Dimensional metrology for micro- and even nanometersized objects is becoming increasingly important in several industry branches. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed mainly following 2 directions: on the one hand, scaling down macro coordinate measuring machines (CMMs) and their related measuring methods and on the other hand, scaling up nano microscopes (like scanning probe microscopes, SPM) and applying 3D measuring methods and CMM measuring strategies.
This seminar covers recent developments of instruments and... Date:
27. September 2010 to 28. September 2010 Location
: Physikalisch-Technische Bundesanstalt in Braunschweig Contact
: Dr. Hans-Ulrich Danzebrink