The seminar, the fifth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developmens for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.
Previous seminars: 2011, 2013, 2015, 2017
Questions about further information may be addressed to: euv2019
Further information Date:
22. October 2019 to 23. October 2019 Location
: Physikalisch-Technische Bundesanstalt in Berlin Contact
: Dr. Frank Scholze