Dimensional metrology for micro- and even nanometersized objects is becoming increasingly important in several industry branches. To achieve the required small uncertainties and probing flexibility new measurement systems have been developed mainly following 2 directions: on the one hand, scaling down macro coordinate measuring machines (CMMs) and their related measuring methods and on the other hand, scaling up nano microscopes (like scanning probe microscopes, SPM) and applying 3D measuring methods and CMM measuring strategies.

This seminar covers recent developments of instruments and probes, standardisation activities in micro/nano coordinate metrology, calibration of suitable standards and reference artefacts as well as th determination of measurement uncertainties.

The seminar also provides an overview of some results obtained within the European Research Project "Universal and Flexible 3D Coordinate Metrology for Micro and Nano Components Production" (acronym: "Nano-CMM")