304. PTB-Seminar

VUV and EUV Metrology

On October 19 and 20, 2017, the 304th PTB Seminar "VUV and EUV Metrology" will take place at the "Hermann von Helmholtz Building" of PTB in Berlin. This seminar, the fourth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. Invited and submitted lectures as well as a poster session will present the latest results in the industrial application of EUV radiation for lithography and measurement technology as well as developments for the space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces with XUV radiation. The implementation is supported by numerous industrial companies as well as the Helmholtz-Fonds e.V.

Date: 19. October 2017 to 20. October 2017
Location: Physikalisch-Technische Bundesanstalt in Berlin Contact : Dr. Frank Scholze