313. PTB-Seminar

VUV and EUV Metrology

The seminar, the fifth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developmens for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Previous seminars201120132015, 2017

Questions about further information may be addressed toeuv2019

Further information

Date: 22. October 2019 to 23. October 2019
Location: Physikalisch-Technische Bundesanstalt in Berlin Contact : Dr. Frank Scholze