317. PTB-Seminar

VUV und EUV Seminar

The seminar, the sixth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Date: 19. October 2021 to 20. October 2021
Location: Physikalisch-Technische Bundesanstalt in Berlin Contact : Dr. Michael Kolbe