317. PTB-Seminar

VUV und EUV Seminar

The seminar, the sixth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces.

Datum: 19. Oktober 2021 bis 20. Oktober 2021
Ort: Physikalisch-Technische Bundesanstalt in Berlin
Kontakt : Dr. Michael Kolbe